1. What RUM could do in CVD-SiC machining

Rotary Ultrasonic Machining (RUM) is a solution to assist CNC machining to achieve ultra-precision machining levels. It has been proven that could decrease the grinding/cutting force and value of surface roughness.

As for the stiff and dense structure of CVD-SiC, RUM technology effectively prolongs tool life. Constant micro-oscillations of high frequency and low amplitude could change the cutting angle and decrease the residual stress between materials and tools so that the surface integrity will be enhanced with less delamination and cracks.

RUM could support CNC automatically programming. For manufacturers with manual-process, RUM provides stable but high-quality processes to save excessive time and material cost.

Click for CVD-SiC part machining case
We have supported our USA customers by introducing RUM technology in CVD-SiC part machining. RUM has been validated that reducing material backfill of tools to 50% and prolonging tool life to 2 times above.

2. Advantages and Application of CVD-SiC
Advanced Ceramics (SiC, Alumina Ceramic, Zirconia) outstand traditional metal and polymers with phenomenal stiffness, hardness, hi-temperature, and corrosion resistance. CVD-SiC(Chemical vapor deposition treated SiC ceramic) is much different from sintered type Silicon Carbide. It could survive in the condition over 1500 (up to 1700) degrees Celsius and withstand chemical and plasma surroundings.

The common method to manufacture silicon carbide components will be hot-pressed and sintered. Which causes grains and hollow porosities inside and leads to fracture, and the requirements of a mechanical demanding environment couldn’t be fulfilled due to instability and brittleness.
The purity of CVD-SiC over 99.9995% leads to denser and stronger structures with fewer micro-cracks inside, which minimize the impact of corrosion and enhance durability. Lightweight, low cost, and high stability in severe conditions make CVD-SiC a perfect choice for Plasma Etch Chamber Components, Wafer Carriers, and RTP & EPI Rings.

CVD-SiC is also an ideal choice for coating for improves corrosion resistance and increases the component’s life or enhancing the performances of tools.

3. Difficulties in machining CVD-SiC
CVD-SiC with hard and dense structure has triggered challenges of the time-consuming process and far shorter tool life in CNC machining. And its chemical inertness and electrically insulation limits manufacturing methods such as EDM. Since the raw material of high-quality CVD-SiC is rather hard to achieve, the manufacturing cost has gone up due to the scarcity and ultra-high-quality standard.

More Information

Drilling Operation in Advanced Ceramic with RUM Technology

Brief introduction of Technical ceramic, precision machining method, and what ultrasonic machining can achieve