Semiconductor M2 Internal Threading of Aluminum Oxide (Al2O3) Ceramic

🕜 Efficiency - enhanced 8x | 📈 Quality - complete profile | ⚙️ Tool Life - improved 6x

What makes Aluminum Oxide (Al2O3) Ceramic difficult to machine?



Aluminum Oxide (Alumina, Al2O3), also known as Alumina, is known for its good hardness and strength, wear resistance, etc.  Generally, the higher the purity, the more robust the chemical and electrical performance it displays. 

This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide reside in its material properties of high hardness and brittleness.  Poor hole quality, including massive edge-crakcs and subsurface damages, have become serious challenges during the machining process. 

Especially for M2 internal threading on aluminum oxide ceramic, the cutting force in the conventional CNC machining was too hard to control, which resulted in serious tool wear, causing the major diameter was getting smaller as the internal thread got deeper.  This would then make the screws unable to be fully locked into the internal threads due to incomplete profile. 

 
 

☑️ Aluminum Oxide (Al2O3) Ceramic Machining Information

 
   Aluminum Oxide (Al2O3) Ceramic Machining Information 
  Material   99.7% Aluminum oxide (Al2O3) ceramic
  Feature   M2 x 0.4mm_depth 4mm_internal thread
  Process   Internal Threading  
  Ultrasonic Tool  Holder   HSKE40-R02-06
  Rotating Speed   30,000 rpm
  Tool Selection                Resmo RNA-DIA-M2-K8-#325
  Single type thread mill                                                  


 
HSK-E40 ultrasonic machining module was used on the machining of aluminum oxide ceramic M2 internal threading
(Figure 1. HSK-E40 ultrasonic machining module was used on the machining of aluminum oxide ceramic M2 internal threading)



HIT ultrasonic-assisted machining of aluminum oxide ceramic M2 internal threading workpiece
(Figure 2. HIT ultrasonic-assisted machining of aluminum oxide ceramic M2 internal threading workpiece)



 

HIT's Goal in Machining Aluminum Oxide (Al2O3) Ceramic


The goal is to successfully make an M2 internal thread on aluminum oxide ceramic with HIT ultrasonic-assisted machining technology on CNC machine tool with single type thread mill.



 

Ultrasonic-Assisted Machining Aluminum Oxide (Al2O3) Ceramic Results

 

Aluminum Oxide (Al2O3) Ceramic M2 Internal Threading : Machining Efficiency

the machining efficiency was enhanced 8 times higher with HIT Ultrasonic on M2 internal threading of aluminum oxide ceramic
(Figure 3. the machining efficiency was enhanced 8 times higher with HIT Ultrasonic on M2 internal threading of aluminum oxide ceramic)

 
  • (Under the same feed per revolution) With HIT ultrasonic, both rotation speed and feed rate can be enhanced over 3 times higher than the ones suggested by the tooling supplier.
    • Firstly, the rotation speed was raised from 10,000 to 30,000rpm, with the feed rate being raised from 20 to 60mm/min.
    • After that, HIT discovered that the process could go even faster.  The feed per revolution was then being raised, resulting in the feed rate eventually being raised from 20 to 300mm/min (15 times higher than the original).
  • The processing time of completing one internal thread was reduced to 1/8 of the processing time without ultrasonic.
  • With HIT ultrasonic, it helped reduce the cutting force under high-speed machining, which accomplished the machining of M2 internal thread on aluminum oxide ceramic.



 

Aluminum Oxide (Al2O3) Ceramic M2 Internal Threading : Workpiece Quality


the comparison of workpiece quality between HIT Ultrasonic and Without Ultrasonic on M2 internal threading of aluminum oxide ceramic
(Figure 4. the comparison of workpiece quality between HIT Ultrasonic and Without Ultrasonic on M2 internal threading of aluminum oxide ceramic)

 
  • With HIT ultrasonic, the high frequency micro-vibration allowed for intermittent contact between the tool and workpiece, which greatly helped reduce cutting heat.
  • The reduction in both cutting force and cutting heat under high-speed (rotation speed 3x higher, and feed rate 15x higher) machining contributed to the completeness of the M2 internal thread profile.



 

Aluminum Oxide (Al2O3) Ceramic M2 Internal Threading : Tool Life


the comparison of tool wear between HIT Ultrasonic and Without Ultrasonic on M2 internal threading of aluminum oxide ceramic
(Figure 5. the comparison of tool wear between HIT Ultrasonic and Without Ultrasonic on M2 internal threading of aluminum oxide ceramic)



the tool life was improved 6 times higher with HIT Ultrasonic on M2 internal threading of aluminum oxide ceramic
(Figure 6. the tool life was improved 6 times higher with HIT Ultrasonic on M2 internal threading of aluminum oxide ceramic)

 
  • The optimized machining parameters (rotation speed 3x higher, and feed rate 15x higher) were to present the best of ultrasonic-assisted machining technology, and as an accelerated test on the tool life.
  • Under the high-speed ultrasonic-assisted machining process, the tool can complete 6 internal threads; whereas the tool could only complete 1 internal thread without ultrasonic (but the test screw was unable to be fully locked into the internal thread).



 

HIT Ultrasonic Machining Technology Achievements


🕜 Efficiency - enhanced 8x
📈 Quality - complete profile
⚙️ Tool Life - improved 6x



 

Aluminum Oxide (Al2O3) Ceramic Machining in Industry Application



Internal Threading Aluminum Oxide (Al2O3) Ceramic is often applied in the Semiconductor industry, especially for ceramic Electrostatic Chucks (ESC, E-chucks) used for even distribution of absorption forces during wafer dicing process.


This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide (alumina, Al2O3) reside in its material properties of high hardness and brittleness.  Poor hole quality, including massive edge-crakcs and subsurface damages, have become serious challenges during the machining process.

That was when HIT's Ultrasonic Machining Module came to help!  HIT offers a comprehensive solution in machining advanced materials.  With the assistance of HIT's Ultrasonic Machining Technology, clients stopped worrying about poor workpiece quality while trying to speed up the processing time.  The machining efficiency can be greatly enhanced while improving the stability in tool life.  HIT assures its clients of not only matching up with their requirements, but also achieving even better outcomes!




💡 Learn more about other HIT Ultrasonic Machining Aluminum Oxide ceramic cases

💡 Introduction on HIT Ultrasonic Machining on advanced materials