Semiconductor Micro-Drilling of Aluminum Oxide (Al2O3) Ceramic

🕜 Efficiency - enhanced 60% | 📈 Quality - without edge-cracks or burrs by sight | ⚙️ Tool Life - well-maintained

What makes Aluminum Oxide (Al2O3) Ceramic difficult to machine?



Aluminum Oxide (Alumina, Al2O3), also known as Alumina, is known for its good hardness and strength, wear resistance, etc.  Generally, the higher the purity, the more robust the chemical and electrical performance it displays. 

This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide reside in its material properties of high hardness and brittleness.  Poor hole quality, including massive edge-crakcs and subsurface damages, have become serious challenges during the micro-drilling process.


 

☑️ Aluminum Oxide (Al2O3) Ceramic Machining Information

 
   Aluminum Oxide (Al2O3) Ceramic Machining Information     
  Material   Aluminum oxide (Al2O3) ceramic
  Feature   Φ0.3 x 5.5mm (blind holes)
   *aspect ratio 18x
  Process   Micro-drilling  
  Ultrasonic Tool Holder           HSKE40-R02-06
  Rotating Speed   11,000 ~ 13,000 rpm


 
HSK-E40 ultrasonic machining module was used on aluminum oxide ceramic micro-drilling
(Figure 1. HSK-E40 ultrasonic machining module was used on aluminum oxide ceramic micro-drilling)



HIT ultrasonic-assisted machining of aluminum oxide ceramic micro-drilling workpiece
(Figure 2. HIT ultrasonic-assisted machining of aluminum oxide ceramic micro-drilling workpiece)




 

HIT's Goal in Machining Aluminum Oxide (Al2O3) Ceramic


The goal is to see the benefits of HIT ultrasonic-assisted machining technology having on the micro-drilling of aluminum oxide ceramic.



 

Ultrasonic-Assisted Machining Aluminum Oxide (Al2O3) Ceramic Results

 

Aluminum Oxide (Al2O3) Ceramic Micro-Drilling : Machining Efficiency

the machining efficiency was enhanced 60% with HIT Ultrasonic on micro-drilling of aluminum oxide ceramic
(Figure 3. the machining efficiency was enhanced 60% with HIT Ultrasonic on micro-drilling of aluminum oxide ceramic)

 
  • With HIT ultrasonic and the optimized machining parameters (S12,000rpm; F2mm/min), the processing time was reduced 60% from 9 minutes/per hole to 3.5 minutes/per hole.
  • The reduction in cycle time helped enhance the machining efficiency by 60%.




 

Aluminum Oxide (Al2O3) Ceramic Micro-Drilling : Hole Quality


the comparison of hole quality between HIT Ultrasonic and Without Ultrasonic on micro-drilling of aluminum oxide ceramic
(Figure 4. the comparison of hole quality between HIT Ultrasonic and Without Ultrasonic on micro-drilling of aluminum oxide ceramic)

 
  • With HIT Ultrasonic, it helped maintain high hole quality workpieces with no obvious edge-cracks or burrs on the drilling holes by sight under microscope.
  • The reduction in cutting force not only helped with better hole quality, but also precisional repeatability of the drilling holes.



 

HIT Ultrasonic Machining Technology Achievements



🕜 Efficiency - enhanced 60%
📈 Quality - without edge-cracks or burrs by sight
⚙️ Tool Life - well-maintained


 

Aluminum Oxide (Al2O3) Ceramic Machining in Industry Application



Micro-drilling Aluminum Oxide (Al2O3) Ceramic is often applied in the Semiconductor industry, especially for ceramic showerheads or ceramic E-chucks as semiconductor fabrication commodities used within the etching or thin film processes.


This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide (alumina, Al2O3) reside in its material properties of high hardness and brittleness.  Poor hole quality, including massive edge-crakcs and subsurface damages, have become serious challenges during the micro-drilling process.

That was when HIT's Ultrasonic Machining Module came to help!  HIT offers a comprehensive solution in machining advanced materials.  With the assistance of HIT's Ultrasonic Machining Technology, clients stopped worrying about poor workpiece quality while trying to speed up the processing time.  The machining efficiency can be greatly enhanced while improving the micro-hole quality.  HIT assures its clients of not only matching up with their requirements, but also achieving even better outcomes!




💡 Learn more about other HIT Ultrasonic Machining technical ceramic cases

💡 Introduction on HIT Ultrasonic Machining on advanced materials