Semiconductor G81 Micro-Drilling of Aluminum Oxide (Al2O3) Ceramic

🕜 Efficiency - 10x higher | 📈 Hole Quality - well-maintained | ⚙️ Tool Life - 5x longer
  • Difficulties in Machining
  • HIT Achievements
  • Industry Application
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What makes Aluminum Oxide (Al2O3) Ceramic difficult to machine?



Aluminum Oxide (Alumina, Al2O3), also known as Alumina, is known for its good hardness and strength, wear resistance, etc.  Generally, the higher the purity, the more robust the chemical and electrical performance it displays. 

This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide reside in its material properties of high hardness and brittleness.  Poor hole quality, including massive edge-crakcs and subsurface damages, have become serious challenges during the micro-drilling process.


 
 

☑️ Aluminum Oxide (Al2O3) Ceramic G81 Micro-Drilling: Machining Information

 
    Aluminum Oxide (Al2O3) Ceramic G81 Micro-Drilling: Machining Information     
  Material   Aluminum oxide (Al2O3) ceramic
  Feature   Φ0.5 x 3mm (blind holes)
   *aspect ratio 6x
  Process   Micro-drilling  
 
  Ultrasonic Tool Holder        		   HSKE40-R01-06
  Ultrasonic Machining Process & Parameters       S 10,000rpm_Ultrasonic Power Level 10%
  G83 drilling to 0.6mm (F 8mm/min), and then G81 drilling to 3mm (F 10mm/min)
  *process time: 30 sec/per hole
  Tool Selection   Union UDCMX 2050-050 Φ0.5 x 5mm CVD 2-flute drill


 
hole quality of HIT ultrasonic-assisted G81 micro-drilling of aluminum oxide ceramic
(Figure 1. hole quality of HIT ultrasonic-assisted G81 micro-drilling of aluminum oxide ceramic)



 

HIT's Goal in Aluminum Oxide (Al2O3) Ceramic G81 Micro-Drilling


The goal is to enhance the machining efficiency, while maintaining great hole quality and increasing tool life.




 

Ultrasonic-Assisted G81 Micro-Drilling of Aluminum Oxide (Al2O3) Ceramic Results

 

Aluminum Oxide (Al2O3) Ceramic G81 Micro-Drilling : Machining Efficiency

the machining efficiency was 10x higher with HIT ultrasonic-assisted G81 micro-drilling of aluminum oxide ceramic
(Figure 2. the machining efficiency was 10x higher with HIT ultrasonic-assisted G81 micro-drilling of aluminum oxide ceramic)


*Original process & parameters: S 10,000rpm_F 3mm/min_Q 0.1mm_G83
  • With HIT ultrasonic, the high frequency micro-vibration in Z-axis direction helped reduce cutting force.
  • By using G81 as the main drilling process, feed rate can be further increased (from F 3mm/min to F 8mm/min, and then to F 10mm/min).  Efficiency was 10x higher with well-maintained hole quality.



 

Aluminum Oxide (Al2O3) Ceramic G81 Micro-Drilling : Tool Life


HIT HSK-E40 ultrasonic machining module was used on aluminum oxide ceramic G81 micro-drilling, which helped reduce tool wear
(Figure 3. HIT HSK-E40 ultrasonic machining module was used on aluminum oxide ceramic G81 micro-drilling, which helped reduce tool wear)



the tool life was 5x longer with HIT ultrasonic-assisted G81 micro-drilling of aluminum oxide ceramic
(Figure 4. the tool life was 5x longer with HIT ultrasonic-assisted G81 micro-drilling of aluminum oxide ceramic)

 
  • Ultrasonic-assisted machining mechanism allowed for easier evacuation of cutting chips (ceramic particles) under G81 process.
  • Under the same machining parameters without ultrasonic, tool breakage happened after drilling 2 holes.  With HIT ultrasonic, the tool could keep drilling after finishing 10 holes.  Tool life was then 5x longer compared to that without ultrasonic.




 

HIT Ultrasonic Machining Technology Achievements


🕜 Efficiency - 10x higher
📈 Hole Quality - well-maintained
⚙️ Tool Life - 5x longer

 

Aluminum Oxide (Al2O3) Ceramic G81 Micro-Drilling: Industry Application



Micro-drilling of Aluminum Oxide (Al2O3) Ceramic is often applied in the Semiconductor industry, especially for ceramic showerheads or ceramic E-chucks as semiconductor fabrication commodities used within the etching or thin film processes.


This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide (alumina, Al2O3) reside in its material properties of high hardness and brittleness.  Poor hole quality, including massive edge-crakcs and subsurface damages, have become serious challenges during the micro-drilling process.


That was when HIT's Ultrasonic Machining Module came to help!  HIT offers a comprehensive solution in machining advanced materials.  With the assistance of HIT's Ultrasonic Machining Technology, clients stopped worrying about poor hole quality while trying to speed up the process time.  The machining efficiency can be greatly enhanced while maintaining great micro- hole quality and increasing tool life.  HIT assures its clients of not only matching up with their requirements, but also achieving even better outcomes!




💡 Learn more about other HIT Ultrasonic Machining technical ceramic cases

💡 Introduction on HIT Ultrasonic Machining on advanced materials