Semiconductor Quartz Glass Grinding : Micro-channel Trochoidal Machining

🕜 Efficiency - less manufacturing steps | 📈 Quality - max. size of edge-cracks 2x smaller | ⚙️ Tool Life - better particle flushing

What makes Quartz Glass Micro-channels difficult to machine?



Quartz glass has high compressive strength, but also displays high hardness and brittleness.  Defects on the surface may have a serious impact on its overall material strength.

The prevention of edge-cracks on the microfluidic devices is essential, for it may lead to turbulent flows within the microfluidic system.  Therefore, it usually needs to go through etching for post-process to remove edge-cracks.  The larger the cracks, the more time and energy it will need to take to remove the edge-cracks during the etching process.

 

☑️ Quartz Glass Micro-channel Trochoidal Machining Information

 
   Quartz Glass Micro-channel Trochoidal Machining Information     
  Material   Quartz Glass
  Feature   Width 1.5mm_length 15mm_micro-channels
  Process   Trochoidal Grinding  
  Ultrasonic Tool Holder           HSKE40-R02-06
  Machining Parameters   S 30,000rpm; F 500mm/min; Ap 0.5mm
  Tool Selection   #400 & #800 Φ1mm Electroplated diamond grinding tools

 
HIT HSK-E40 ultrasonic machining module was used on micro-channel trochoidal machining of quartz glass
(Figure 1. HIT HSK-E40 ultrasonic machining module was used on micro-channel trochoidal machining of quartz glass)


HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass in the making of microfluidic devices
(Figure 2. HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass in the making of microfluidic devices)


 

HIT's Goal in Micro-channel Trochoidal Machining of Quartz Glass


Through the assistance of HIT ultrasonic-assisted machining technology, the goal is to reduce the size of edge-cracks around the micro-channels in the trochoidal grinding of quartz glass.




 

Ultrasonic-Assisted Trochoidal Grinding of Quartz Glass Machining Results

 

Quartz Glass Micro-channel Trochoidal Machining: Workpiece Quality

HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass helped reduce the maximum size of edge-cracks (1x smaller and 2x smaller) by using #400 and #800 grinding tools respectively
(Figure 3. HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass helped reduce the maximum size of edge-cracks (1x smaller and 2x smaller) by using #400 and #800 grinding tools respectively)

 
  • The original process needed to go through by using #200, #400, and #800 grinding tools from roughing to finishing.  With HIT ultrasonic, customer's requirement on workpiece quality can be achieved just by using #800 grinding tool.
  • With HIT ultrasonic, high frequency micro-vibration helped reduce grinding forces.  (Under the same machining parameters) The maximum size of edge-cracks was 1x smaller (from 0.182mm to 0.094mm) than that without ultrasonic, by using #400 grinding tool. 
  • (Under the same machining parameters) The maximum size of edge-cracks can be even smaller (down to 0.059mm) by using #800 grinding tool with HIT ultrasonic, while it failed to complete the machining process without ultrasonic due to tool breakage at the first slot.



HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass helped reduce the maximum size of edge-cracks, resulting in 2x improvement in workpiece quality
(Figure 4. HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass helped reduce the maximum size of edge-cracks, resulting in 2x improvement in workpiece quality)





 

Quartz Glass Micro-channel Trochoidal Machining: Tool Life

HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass brought better particle flushing, preventing the tool from particles accumulation
(Figure 5. HIT ultrasonic-assisted micro-channel trochoidal machining of quartz glass brought better particle flushing, preventing the tool from particles accumulation)

 
  • With HIT ultrasonic, the tool constantly lifted from workpiece, which allowed for easier inflow of cutting fluid.  Better particle flushing prevented the tool from serious material backfill.  This not only reduced tool wear but also friction between tool and workpiece, which helped control and reduce grinding forces.
  • (Under the same machining parameters) Without ultrasonic, the tool was in constant contact with workpiece, which made it hard for particle flushing.  There were massive particles accumulated on both side and bottom of the tool.  This weakened the tool's grinding ability and led to an increase in grinding forces.  It not only impacted workpiece quality, but also caused serious tool wear.





 

HIT Ultrasonic Machining Technology on Micro-channel Trochoidal Machining of Quartz Glass Achievements



🕜 Efficiency - less manufacturing steps
📈 Quality - max. size of edge-cracks 2x smaller
⚙️ Tool Life - better particle flushing

 

Quartz Glass Micro-channel Trochoidal Machining in Industry Application



Micro-channel trochoidal grinding of quartz glass is applied in the Semiconductor, Electronics, and Biomedical industry, especially used for microfluidic devices.


Quartz glass has excellent electrical insulation property and is inert to attacks from all kinds of acids, even in very high concentrations, except for hydrofluoric acid.  The material has high compressive strength, but also displays high hardness and brittleness.  Defects on the surface may have a serious impact on its overall material strength.

Microfluidic devices are specialized in controlling, distributing, and manipulating gases and fluids in a network of micro-channels.  It helps decrease energy consumption with minor sample handling, reduce process time for reaction and analysis, and improve the precision and flexibility of semiconductor manufacturing experiments. 

However, due to the high hardness and brittleness of quartz glass, the risk of trochoidal grinding of quartz glass resides in massive chipping and edge-cracks around the micro-channels.  The prevention of edge-cracks on the product is essential, for it may lead to turbulent flows within the microfluidic system.  Therefore, it usually needs to go through etching for post-process to remove edge-cracks.  The larger the cracks, the more time it will need to take to remove the edge-cracks during the etching process.


That was when HIT's Ultrasonic Machining Module came to help!  HIT offers a comprehensive solution in machining advanced materials.  With the assistance of HIT's Ultrasonic Machining Technology, clients stopped worrying about poor workpiece quality while trying to speed up the processing time.  The machining efficiency can be greatly enhanced while improving workpiece quality and the stability in tool life.  HIT assures its clients of not only matching up with their requirements, but also achieving even better outcomes!



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