Semiconductor Profile Grinding of Aluminum Oxide (Al2O3) Ceramic

🕜 Efficiency - 2x higher | 📈 Quality - nearly 3x better | ⚙️ Great Reduction in Tool Wear

What makes Aluminum Oxide (Al2O3) Ceramic difficult to machine?



Aluminum Oxide (Alumina, Al2O3), also known as Alumina, is known for its good hardness and strength, wear resistance, etc.  Generally, the higher the purity, the more robust the chemical and electrical performance it displays. 

This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide reside in its material properties of high hardness and brittleness.  Especially when grinding alumina ceramic, it usually faces with poor removal of ceramic particles, severe tool wear, and excessively time-consuming process.


 

☑️ Profile Grinding of Aluminum Oxide (Al2O3) Ceramic: Machining Information

 
    Profile Grinding of Aluminum Oxide (Al2O3) Ceramic: Machining Information 
  Material   99.5% Aluminum oxide (Al2O3) ceramic
  Feature   - External cylindrical grinding: Φ51 ➡️ Φ30 x 10mm
  - Internal bottom grinding: Φ8 ➡️ Φ25 x 2mm
  - Through-hole grinding (4 holes): Φ7 x 17mm (aspect ratio 2.4x)

  *workpiece size: Φ51 x 19mm (pre-drillled center hole Φ8 x 19mm)
  Ultrasonic Toolholder       HSKE40-R02-06  
  Tool Selection   #200 Φ5mm HIT Ultrasonic electroplated diamond grinding tool
  Ultrasonic Machining Parameters & Process        [External cylindrical grinding]
  S 8,000rpm _ F 200mm/min _ Ap 5mm _ Ae 0.03mm _ Ultrasonic Power Level 100%  

  [Internal bottom grinding]
  S 8,000rpm _ F 200mm/min _ Ap 1mm _ Ae 0.03mm _ Ultrasonic Power Level 100%    

  [Through-hole grinding]
  S 8,000rpm _ F 200mm/min _ pitch 0.05mm _ Ultrasonic Power Level 100%    
 
 

【New Product Launch!! HIT Ultrasonic Electroplated Diamond Grinding Tool】

 

  • HIT customized ultrasonic electroplated grinding tool with exclusive formulation.
  • Work perfectly with Ultrasonic Machining Module.
  • Maximize the benefits of CNC grinding process with ultrasonic.


Product specification of HIT s new product - ultrasonic electroplated diamond grinding tool
(Figure 1. Product specification of HIT's new product - ultrasonic electroplated diamond grinding tool)


HIT s new product - ultrasonic electroplated diamond grinding tool is suitable for grinding of alumina ceramic
(Figure 2. HIT's new product - ultrasonic electroplated diamond grinding tool is suitable for grinding of alumina ceramic)


Using regular electroplated grinding tool with ultrasonic may greatly increase tool wear
(Figure 3. Using regular electroplated grinding tool with ultrasonic may greatly increase tool wear)



💡 Want to know more about this new product? Feel free to CONTACT US.

 
HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding process
(Figure 1. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding process)


HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding process
(Figure 2. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding process)


HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding - External Cylindrical Grinding feature
(Figure 3. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding - External Cylindrical Grinding feature)


HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding - Internal Bottom Grinding feature
(Figure 4. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding - Internal Bottom Grinding feature)



(Figure 5. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding - Through-hole Grinding feature)



 

HIT's Goal in Profile Grinding of Aluminum Oxide (Al2O3) Ceramic


The goal is to do profile grinding on aluminum oxide ceramic with HIT ultrasonic-assisted machining technology on CNC machine with HIT ultrasonic electroplated diamond grinding tool.  It is expected to enhance machining efficiency and prolong tool life on the premise of maintaining great workpiece quality.




 

Ultrasonic-Assisted Profile Grinding of Aluminum Oxide (Al2O3) Ceramic: Machining Results

 

Profile Grinding of Aluminum Oxide (Al2O3) Ceramic: Machining Efficiency

HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding, and the feed rate can be raised 2x faster
(Figure 6. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding, and the feed rate can be raised 2x faster)


HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding, and the machining efficiency was 2x higher
(Figure 7. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding, and the machining efficiency was 2x higher)

 
  • With HIT ultrasonic, along with HIT ultrasonic electroplated diamond grinding tool, the high frequency micro-vibration allowed for easier removal of ceramic particles (material debris) from the grinding tool, which helped reduce grinding force.
  • On the premise of maintaining great workpiece quality, feed rate can be raised 2x faster compared to that without ultrasonic.
  • The total process time went from 8 hours to 4 hours, which brought 2x higher machining efficiency.



 

Profile Grinding of Aluminum Oxide (Al2O3) Ceramic: Workpiece Quality

HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding, and the size of edge-cracks can be reduced nearly 3x smaller
(Figure 8. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding, and the size of edge-cracks can be reduced nearly 3x smaller)


HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding​​​​​​​, and the workpiece quality was nearly 3x better
(Figure 9. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding​​​​​​​, and the workpiece quality was nearly 3x better)

 
  • With HIT ultrasonic, along with HIT ultrasonic electroplated diamond grinding tool, the high frequency micro-vibration allowed for easier removal of ceramic particles.
  • Reduction in grinding force and tool wear stabilized the entire grinding process.  This helped restrain the formation of edge-cracks.
  • The workpiece quality was thus nearly 3x better than that without ultrasonic.



 

Profile Grinding of Aluminum Oxide (Al2O3) Ceramic: Tool Life

HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding​​​​​​​, which helped greatly reduce tool wear
(Figure 10. HIT HSK-E40 ultrasonic machining module with HIT ultrasonic electroplated diamond grinding tool were used on aluminum oxide ceramic profile grinding​​​​​​​, which helped greatly reduce tool wear)

 
  • With HIT ultrasonic, along with HIT ultrasonic electroplated diamond grinding tool, the high frequency micro-vibration allowed for easier removal of ceramic particles.
  • Both side and bottom areas of the grinding tool had much less accumulation of ceramic particles compared to that without ultrasonic, and the tool was able to continue machining after completing one ceramic workpiece.
  • Great improvement in tool wear helped reduce grinding force.  This not only contributed to great workpiece quality, but also provided an opportunity to increase the machining efficiency.




 

HIT Ultrasonic Machining Technology Achievements in Profile Grinding of Aluminum Oxide (Al2O3) Ceramic


(with HIT Ultrasonic Electroplated Diamond Grinding Tool)

🕜 Efficiency - 2x higher
📈 Quality - nearly 3x better
⚙️ Great Reduction in Tool Wear

 

Profile Grinding of Aluminum Oxide (Al2O3) Ceramic: Industry Application



Profile Grinding of Aluminum Oxide (Al2O3) Ceramic is often applied in the Semiconductor industry, especially for ceramic Electrostatic Chucks (ESC, E-chucks) which uses electrostatic force to chuck/hold down wafer to ensure stability during wafer dicing process.


This material has plenty of excellent mechanical and chemical properties that allow for a wide range of industrial applications.  For instance, its great chemical resistance and thermal stability have made it ideal for key components in semiconductor processing, wafer chucks, as well as CMP plates.

The major difficulties in machining aluminum oxide (alumina, Al2O3) reside in its material properties of high hardness and brittleness.  


That was when HIT's Ultrasonic Machining Module came to help!  HIT offers a comprehensive solution in machining advanced materials.  With the assistance of HIT's Ultrasonic Machining Technology and HIT Ultrasonic Electroplated Diamond Grinding Tool, clients stopped worrying about poor workpiece quality while trying to speed up the process time.  The machining efficiency can be enhanced while tool wear is greatly reduced.  HIT assures its clients of not only matching up with their requirements, but also achieving even better outcomes!




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